飞秒激光烧蚀加工恒弹性合金的规律研究

Research on processing rules of constant elasticity alloy by femtosecond laser ablation

恒弹性合金的加工对表面质量和加工精度的要求越来越高,为了实现对恒弹合金的精密定量去除,本文探索了采用飞秒激光烧蚀的加工新方法。首先,分析计算了在高强度飞秒激光辐照加工下,恒弹性合金材料的烧蚀阈值;其次,实验研究了飞秒激光脉冲能量和脉冲个数对该材料上烧蚀加工微坑的直径和深度的影响,结果表明:恒弹性合金的飞秒激光烧蚀阈值为0.167J/cm2;可以通过增大脉冲能量来增大烧蚀坑直径,通过增大脉冲数来增大烧蚀坑深度。脉冲烧蚀坑直径上限为150.64μm,运用飞秒激光旋切加工方法,可获得直径为500μm的微孔,提高了飞秒激光烧蚀加工的能力。

The processing of constant elasticity alloy demands higher surface quality and machining accuracy. In order to achieve the precise and quantitative removal of constant elasticity alloy,a new machining method using femtosecond laser ablation was explored. Firstly,the ablation threshold of constant elasticity alloy material was calculated and analyzed under the irradiation of high intensity femtosecond laser; secondly,the effect of femtosecond laser pulse energy and pulse number on diameters and depths of the ablated micro craters was experimentally studied. The experimental results show that： the femtosecond laser ablation threshold of constant elasticity alloy is 0. 167 J / cm^2; the ablation diameter increases with the increasing of pulse energy,and the ablation depth increases with the increasing of pulse number. The maximum of femtosecond laser pulse ablation diameter is 150. 64 μm,and using femtosecond laser trepanning method,a micro hole with diameter of 500 μm is obtained,which improves the ability of femtosecond laser ablation process.