特殊材料蚀刻线宽精度控制能力及控制方法

Special material etching finewidth accuracy control capacity and control method

文章主要针对特殊材料蚀刻加工线宽的精度控制，通过不同铜厚和不同的补偿值进行验证，总结出特殊材料蚀刻过程中的补偿值和CPK对应关系，从而对特殊材料蚀刻，影响因素进行初步分析和探讨，为业界特殊材料蚀刻加工线条，提供一定的参考和借鉴。

In this paper the view of the special material etching linewidth control accuracy was verified by different copper thickness and different compensation value. It summed up the special material etching process compensation value and the relationship of CPK, thus to the special material etching, the influence factors of the preliminary analysis and discussion, for the industry special material etching processing lines. It provided some reference.