摘要
通过磨削试验,从主轴电流、齿高磨损、磨削工件表面质量等方面,研究了单晶、自锐1#、自锐2#金刚石对工件磨削性能的影响。研究结果表明:在各磨削参数相同的条件下,自锐2#金刚石树脂砂轮的工作电流最稳定且最小,砂轮齿高磨损最少,硅片磨削表面质量与另外两种金刚石砂轮相差不大。自锐2#金刚石树脂砂轮总体磨削性能最佳。
The influence of monocrystalline and self‐sharpening diamonds on the grinding performance was studied from mainly three aspects , namely spindle current , wheel wear , and surface quality of ground work piece . The research results showed that grinding performance of self‐sharpening 2# diamond outperformed those of the other two kinds of diamonds on stability of working current , wheel wear , with same surface quality of ground wafer . It demonstrated that the overall performance of self‐sharpening 2# diamond was the best among the three .
出处
《金刚石与磨料磨具工程》
CAS
2015年第5期63-66,71,共5页
Diamond & Abrasives Engineering
关键词
自锐金刚石
砂轮
硅片
砂轮磨损
表面质量
self-sharpening diamond
grinding wheel
silicon wafer
wheel wear
surface quality
