磁控溅射法制备纳米晶纯钛及其力学性能研究

Preparation and Mechanical Property Study on Nanostructured Ti Deposited by Magnetron Sputtering

通过直流磁控溅射法制备纯钛薄膜,使用X射线衍射仪、扫描电镜和透射电镜对其进行分析表征。采用纳米压痕技术分别测试其应变速率在0.005~0.1 s^(-1)时对应的硬度大小。通过计算得到应变速率敏感性指数和激活体积,分析得到纳米晶钛起主导作用的塑性变形机制为位错和晶界的相互作用。

The nanostructured titanium films were deposited by magnetron sputtering. The film was analyzed and characterized by XRD, SEM and high-resolution transmission microscopy. The hardness was tested by nanoindentation technique with the strain rate ranging from 0.005 s^-1 to 0. 1 s^-1. By the calculation, strain rate sensitivity index and activation volume were obtained, it will be interesting to examine the behavior of nanostructured titanium that the interactions between dislocations and grain boundary are more likely to become dominant mechanism.