多层介质膜偏振无关光栅的研制

Fabrication of polarization independent gratings made on multilayer dielectric thin film substrates

介绍了一种应用于光纤激光光谱合束的高衍射效率多层介质膜偏振无关光栅的设计及制作,给出了设计参数、制作流程和最终制作的偏振无关光栅的测量结果,在1.044-1.084μm波长范围内,实验测得的TE偏振光、TM偏振光的平均衍射效率分别为89.7%,93.8%。

We briefly present design parameters and fabrication procedures of polarization independent gratings made on multilayer dielectric thin film substrates for spectral beam combining applications.In the wavelength range of 1.044μm to 1.084μm the-1st Littrow order average diffraction efficiencies of TE polarization and TM polarization are 89.7%and 93.8%respectively.