摘要
为了满足大尺寸衍射光栅拼接调整架精密调整的需求,设计了一种滚珠丝杆的机械式微位移驱动器,能够实现十几毫米的大行程。为了达到高分辨率,在根据系统辨识得到的线性传递函数的基础上,设计了基于轨迹规划的控制器和不完全微分PID两种控制器,在进行仿真对比的基础上,采用双频激光干涉仪作为反馈环节进行微米级和纳米级阶跃响应实验,初步实验证明,改进的驱动系统能够实现很高的分辨率,且使用轨迹规划控制器与传统PID控制器相比,超调量较小,调节速度也更快,能够适用于伺服定位控制系统之中。
To meet the demand of nano-step actuator used in large-diameter grating tiling, a mechanical based on ball screw was designed in the paper. It can meet the requirements of millimeters long range. To achieve high resolution, a path planning controller and a PID controller was designed based on the linear transfer function obtained by system identification. Moreover, both simulation and step response experiment were carried out based on laser interferometer feedback. Experiment show the actuator can achieve high resolution and keep high stability. Compared with conventional PID controller, the path planning controller has less overshoot and faster response speed. So it is well suited to servo positioning control.
出处
《计算机仿真》
CSCD
北大核心
2015年第11期245-249,共5页
Computer Simulation
