物理冶金技术在失效分析中的应用与发展

Application and Development of Physical Metallurgy Techniques in Failure Analysis

物理冶金技术是失效分析的主要手段之一,在失效性质确定、失效模式判别及失效原因分析中发挥了重要作用。本研究综述了光学金相、扫描电子显微术(SEM)、透射电子显微术(TEM)等几种常用的组织形貌观察技术,并比较其特点及其在失效分析中的应用范围;以X射线衍射(XRD)和电子衍射(ED)技术为代表,介绍了结构分析技术在残余应力分析及迹线分析中的应用;以电子探针微束分析(EMPA)技术为代表,介绍了在微区成分表征技术在元素偏析的应用;并对物理冶金技术的发展方向进行展望。

Physical metallurgy technology is one of the main means of failure analysis,which plays an important role in the failure nature determining,failure mode distinguishing and failure reason analyzing. In the present work,several common morphology observation techniques, such as optical metallography, scanning electron microscopy（ SEM） and transmission electron microscopy（ TEM）,have been overviewed,and their characteristics and application range in failure analysis were compared.The applications of structure analysis technology in residual stress analysis and trace analysis were introduced,which is represented typically by X-ray diffraction（ XRD） and electron diffraction（ ED）. The application of the micro-area composition characterization technique in the element segregation analysis was also introduced,which is represented typically by electron probe micro-beam analysis（ EMPA）. And the development direction of physical metallurgy technology is prospected.