压电传导单晶硅MEMS谐振器设计

Design of piezoelectric crystal silicon MEMS resonator

压电传导单晶硅MEMS谐振器是压电谐振器的一种,与传统的声表面波谐振和薄膜体声波谐振的不同在于使用体硅作为能量传导介质。单晶硅比石英晶体具有更高的能量密度,因此谐振器具有更好的线性度和更高的Q值。文章从基本谐振器设计原理为基点针对单晶硅传导测试指标做分析,设计了中心频率在10MHz的压电传导单晶硅MEMS谐振器。

MEMS resonator is a kind of piezoelectric resonator, which is different from the traditional SAW resonator and film bulk acoustic resonance. Single crystal silicon has a higher energy density than the quartz crystal, so the resonator has better linearity and higher Q value. In this paper, the basic principle of the resonator design is analyzed, and the center frequency of the MEMS is designed.