用三维坐标对光电成象系统点扩散函数和调制传递函数的研究

ON THE DETERMINATION OF MULTI-ENERGY POINT SPREAD FUNCTION AND MODULATION TRANSFER FUNCTION IN ELECTRON OPTICAL IMAGING SYSTEMS USING THREE DIMENSIONAL COORDINATE

本文建立一阶横向象差半径的三维曲面图,用形象的手段全面探讨了阴极透镜的点扩散函数(PSF)、象差的均方根(RMS)半径和电子光学调制传递函数(MTF)的确定。

A study for determining the multi-energy Point Spread Function (PSF), root mean square radius of aberration and electron optical Modulation Transfer Function (MTF) in cathode lenses by means of a geometric figure of three dimensional coordinate has been fully described in the paper.