摘要
高阻计、数字源表等仪器在半导体行业有着广泛的应用. 但目前市场上1MΩ-100GΩ高值电阻器准确度（±1. 0x10-3 -±1. 0x10-2）无法满足高阻计、数字源表等仪器电阻参数的溯源需求. 本文提出了一种高精度的高值电阻器的校准方法,该方法由两个多功能校准源和指零仪组成的比较电桥实现. 根据校准方法组建了1MΩ-100GΩ测量系统,测量结果的不确定度为3. 0x10-5 -8. 0x10-4,可满足市场上绝大部分高阻测量仪器的校准需求.
High resistance meter and digital source-meter have a wide application in semiconductor industry. But commercial high value resistance whose accuracy is （±1. 0x10-3 -±1. 0x10-2） cannot meet the need of traceability of resistance parameter for high resistance meter and digital source-meter. The paper demonstrates a high accurate calibration method for commercial high value dc resistor, realized by a comparator bridge composed of two multifunctional calibrated voltage source and a zero-current-me-ter. A calibrated system is set based on the method, and the measurement uncertainty is 3. 0x10-5 -8. 0 x10-4 , whose accuracy can meet the calibration need of most of high resistance measurement instrument.
出处
《宇航计测技术》
CSCD
2015年第5期54-56,69,共4页
Journal of Astronautic Metrology and Measurement
关键词
高值电阻器
校准方法
高阻计
比较电桥
High value resistor
Calibration method
High resistance meter
Comparator bridge
