超精密静压支承部件及其在超精密加工机床的应用

Ultra Precision Hydrostatic Bearing Components and Its Application in Ultra Precision Machine Tools

超精密加工技术与装备在近年得到极大发展。超精密静压部件是超精密加工装备关键共性部件。以平面气体静压支承为例,介绍了静压支承基本工作原理。对超精密液体/气体静压主轴、导轨和转台的结构特点、技术特性、应用场合作了较全面的介绍;以典型超精密加工机床为例,介绍静精密静压主轴、导轨和转台在超精密加工机床中的应用。

Ultra precision machining technique and equipment have developed greatly in recent years. Ultra precision hydrostatic bearing component is a key common component of ultra-precision processing equipment. The structure characteristics, technical proper-ties and application situation of hydrostatic/aerostatic bearing spindle, guide-way and rotary table were introduced roundly. A typical ul-tra-precision machine tool was taken as an example to present the application of the ultra precision hydrostatic/aerostatic bearing spin-dle, guide-way and rotary table.