母光栅刻划设备运动平台机械误差分析

Mechanical Error Analysis for Motion Platform of Master Grating Ruling Engine

为了确定母光栅刻划设备运动平台各项机械误差与设备最终刻划精度之间的数学关系,为设备的设计和制造提供相关理论依据。首先,采用多体系统动力学方法,确立了母光栅刻划设备运动平台的拓扑结构及低序体阵列。然后,分析确定了运动平台的机械误差所包含的各个误差项,并建立了运动平台机械误差与设备最终刻划误差之间的误差分析模型。最后,应用Matlab软件根据所建模型对母光栅刻划设备的刻划精度进行了仿真分析。仿真结果表明:各项机械误差综合结果在各轴向的分量都在±0.4μm范围之内,均满足母光栅刻划设备精度要求。所建立的误差分析模型具有简洁方便、便于编程等优点,可以作为设备设计时误差合成和误差分配的依据。

In order to establish the relationship between the mechanical errors of the motion platform and the ultimate accuracy for the master grating ruling engine,and provide a theoretical basis for the design and manufacture. First,the topological structure and the lower body array have been established,using the method of multibody system dynamics.Then after establishing the error components of the mechanical error of the motion platform,a analytical model between the error components and the ultimate accuracy of the master grating ruling engine has been established. Finally,Matlab simulation for the accuracy of the master grating ruling engine based on the model has been accomplished. The simulation results indicate that every axial error component is within ±0.4μm range and meets the master grating ruling requirement. The model can be used as a theoretical basis of error synthesis and error allocation for instrument design,as well as its advantages of simple and convenient,and easy programming etc.