光电显微镜的光学系统设计

The Optical System Design of Photoelectric Microscope

光电显微镜具有很高的灵敏度,能够消除测量过程中的主观性,提高测量过程的自动化与准确度。为了提高光电显微镜的测量精度,本文采用物方远心的原理设计了一应用于比长仪的物方远心光电显微镜。设计结果:视放大倍率Γ=100倍,物方线视场2y=0.5mm,数值孔径NA=0.2,分辨率σ=1.68μm,工作距离28.5mm,光学系统波像差小于1/4λ,传递函数接近衍射极限。光电显微镜的光学测量误差小于0.7%。

Photoelectric microscope has a high sensitivity and can eliminate the subjectivity in the process of measurement,improving the automation and accuracy of the measurement process. In order to improve the measurement precision of the photoelectric microscope,this paper uses the tele-centric principle to design photoelectric microscope which is applied in length comparator. The system result：Γ=100,the object side view 2y=0.5mm,numerical aperture NA=0.2,the resolution of the σ=1.68μm,working distance=28.5mm. The optical system of wave aberration is less than 1/4λand transfer function is close to the diffraction limit. finally,the visual measurement error being less than 0.7%.