摘要
研究了具有不同取向Ca F2晶体材料的表面加工特性问题。首先通过对具有不同取向Ca F2晶体材料的表面进行精密加工实验,研究了抛光过程中去除率与所加工表面晶向的关系;对所加工的表面质量进行测试,分析了晶体取向与表面抛光所获得粗糙度的关系。结合Ca F2晶体的结构与其物理特性,讨论了造成不同取向Ca F2晶体材料表面加工特性差异的原因,得出了(111)晶面在相同加工条件下可获得最佳抛光质量的结论。
Studied the surface processing characteristics of the Ca F2 crystal material with different orientation. First,the relation between the polishing removal rate and the crystal orientations was investigated. Furthermore,through the measurements for the roughness of the processing surface,found the surface roughness were changing with the crystal orientation.The polishing experiments showed that the（111） surface could obtain the best polishing roughness under the same processing parameters.Based on the crystal structure and its physical property,the reason why the process characteristics were variant to the crystal orientations was analyzed.
出处
《长春理工大学学报（自然科学版）》
2015年第5期68-71,共4页
Journal of Changchun University of Science and Technology(Natural Science Edition)
基金
长春市科技支撑计划项目(11KZ44)
长春理工大学国家大学生创新创业训练计划项目(2012S40)
关键词
机械抛光
CaF2晶体
去除率
表面粗糙度
mechanical polishing
CaF2 crystal
removal ratio
surface roughness
