TiAlN和TiCrAlN薄膜的制备和耐磨性能

Preparation and wear properties of TiAlN and TiCrAlN films

采用电弧离子镀和非平衡磁控溅射镀膜技术沉积TiAlN,TiCrAlN薄膜和TiCrAlN/TiCrN复合薄膜。采用扫描电镜(SEM)观察薄膜表面形貌和磨痕形貌,X射线衍射(XRD)检测薄膜结构,俄歇电子能谱仪(AES)分析薄膜成分,摩擦磨损试验评价薄膜的耐磨损性能。实验结果表明,采用Ti/TiN复合膜过渡层,可有效提高薄膜与基体的结合性能;采用磁控溅射与电弧离子镀复合技术制备的TiCrAlN/TiCrN薄膜表面较光滑、粗糙度小,与基体结合强度较高,仅产生较轻微的磨粒磨损和疲劳磨损,具有较优的耐磨性能,适合用于刀具表面处理。

A series of TiAlN,TiCrAlN single-layer films and TiCrAlN/TiCrN multi-layer film were deposited by arc ion plating and unbalanced magnetron sputtering. The morphology,phase composition,elements content and wear resistance were investigated by scanning electron microscope,X-ray diffraction,Auger electron spectroscopy and wear tester. The results showed that,the Ti/TiN interlayer could effectively improve the adhesion properties between the film and substrate. TiCrAlN/TiCrN multilayer film exhibited the best adhesion strength and wear resistance,which was fit for the surface modification of cutting tools.