基于非晶SiO_2过渡层在硬质合金刀具基体上沉积金刚石涂层（英文）

Amorphous SiO_2 interlayers for deposition of adherent diamond films onto WC-Co inserts

以氢气和正硅酸乙酯为反应源,采用前驱体裂解的方法在硬质合金基体上制备非晶SiO2(a-Si O2)薄膜。X射线衍射(XRD)分析表明,非晶薄膜与基体发生反应,并在界面上形成硅钴化合物。此外,透射电镜(TEM)表征表明,该薄膜由微米级的空心球团状的非晶SiO2颗粒构成。随后,将非晶SiO2薄膜作为过渡层,采用热丝化学气相沉积技术在过渡层上沉积金刚石涂层。通过压痕试验表征制备获得的金刚石-非晶SiO2复合涂层对硬质合金基体的附着力。通过加工玻璃丝纤维增强塑料(GFRP)表征该复合涂层的切削性能。结果表明,非晶SiO2过渡层可以有效地改善金刚石涂层对硬质合金基体的附着力。此外,非晶SiO2过渡层的厚度对金刚石涂层附着力的提升效果有很大影响。

Amorphous Si O2（a-Si O2） films were synthesized on WC-Co substrates with H2 and tetraethoxysilane（TEOS） via pyrolysis of molecular precursor.X-ray diffraction（XRD） pattern shows that silicon-cobalt compounds form at the interface between a-Si O2 films and WC-Co substrates.Moreover,it is observed by transmission electron microscope（TEM） that the a-Si O2 films are composed of hollow mirco-spheroid a-Si O2 particles.Subsequently,the a-Si O2 films are used as intermediate films and chemical vapor deposition（CVD） diamond films are deposited on them.Indentation tests were performed to evaluate the adhesion of bi-layer（a-Si O2 ＋ diamond） films on cemented carbide substrates.And the cutting performance of bi-layer（a-Si O2 ＋ diamond） coated inserts was evaluated by machining the glass fiber reinforced plastic（GFRP）.The results show that a-Si O2 interlayers can greatly improve the adhesive strength of diamond films on cemented carbide inserts;furthermore,thickness of the a-Si O2 interlayers plays a significant role in their effectiveness on adhesion enhancement of diamond films.