摘要
采用有限元法针对微测辐射热计的热电耦合敏感机理进行研究。建立微测辐射热计精确三维有限元模型,采用动态热电有限元方法对器件的热电特性进行了分析,得到了其热电耦合场下的温度响应特性,并获取其热容、有效热时间常数和有效热导值等热学参数;采用该方法在微测辐射热计的设计阶段中,即可初步预判器件性能并为器件制备提供可靠的参考。所设计结构经流片验证,性能良好,且满足60Hz帧频成像要求。
Thermoelectricity field-coupling theory of microbolometer was studied by finite element analysis（FEA）.Three-dimensional model of VO2 microbolometer was estabilished.Dymantic thermoelectricity field-coupling FEA method was used to analyse the thermoelectric properties.The thermal capacity,effective thermal conductivity and effective thermal time constant of the model were obtained.Performance of microbolometer can be estimated and reliable reference can be offered during the earlier design stage by using this method.A 320×240uncooled infrared focal plane with the pixel of 37μm was fabricated based on this design,presenting agood performance under the frame rate of 60 Hz.
出处
《半导体光电》
CAS
北大核心
2015年第5期689-692,共4页
Semiconductor Optoelectronics
基金
国家自然科学基金项目(61235006
61421002)
关键词
微测辐射热计
有限元分析
热导
热时间常数
热电耦合场分析
micorobolometer
finite element analysis
thermal conductivity
thermal time constant
thermoelectricity field-coupling
