气相沉积Ti/TiN多层薄膜的力学及耐腐蚀性能研究

Mechanical and Anti-corrosion Properties of Ti / Ti N Multilayer Films Prepared by PVD

目的研究多层薄膜的界面对薄膜性能的影响。方法通过直流磁控溅射法在45#钢表面制备Ti N及Ti/Ti N多层薄膜,采用扫描电镜和XRD衍射分析仪对薄膜表面形貌及相结构进行观察和分析,使用纳米压痕仪、电子薄膜应力分布测试仪对Ti N及Ti/Ti多层薄膜的力学性能以及残余应力大小进行研究,并运用电化学设备对Ti N及不同调制周期的Ti/Ti多层薄膜的耐腐蚀性能进行研究。结果制备的Ti N及Ti/Ti N多层薄膜表面光滑且结构致密,Ti N晶粒细小且为非晶相;薄膜力学性能良好,内部均存在残余压应力。随着调制周期的减小,弹性模量和硬度先减小后增大,内部残余应力逐渐减小且分布不均匀程度逐渐增大。薄膜在H_2SO_4中的腐蚀试验表明:当Ti/Ti N多层薄膜调制周期为1μm时,多层薄膜的耐腐蚀性能不如Ti N薄膜,随着Ti/Ti N多层薄膜随调制周期的减小,多层薄膜的耐腐蚀性能逐渐升高;当调制周期为0.5μm时,Ti/Ti N多层薄膜的耐蚀性能已超过Ti N薄膜。结论 Ti/Ti N多层薄膜界面的增多有助于减小薄膜的残余应力,并且可提高薄膜的耐蚀性能。

Objective To investigate the influence of interface of multi-layer films on the film performance. Methods TiN and Ti/TiN multi-layer films were fabricated on 45^# steel by DC magnetron sputtering. The surface morphology and phase composition were analyzed by transmission electron microscopy and X-ray diffraction. The mechanical properties and residual stress of the films were evaluated using nano-indentation tester and electronic film distribution tester. The corrosion resistance properties of TiN and Ti/Ti multilayer films with different modulation cycles were studied by electrochemical devices. Results The experimental results showed that the surface of the TiN and Ti/Ti multilayer films was smooth and the structure was dense. The mechanical properties of TiN film were good with small grain and amorphous phase, and there was internal compression residual stress. With decreasing modulation cycle, the elastic modulus and micro-hardness of Ti/TiN multi-layer films first decreased and then increased, the internal residual stress decreased gradually, while the non-uniform degree of distribution increased. The corrosion test of the films in H2SO4 solution showed： when the modulation cycle of Ti/TiN multilayer film was 1 μm, the corrosion resistance of TiN film was better than that of the muhilayer films, with the decrease of modulation cycle of Ti/TiN multilayer films, the corrosion resistance of multilayer films increased gradually ; when modulation cycle of Ti/TiN multilayer film was 0.5 μm, the corrosion resistance of Ti/ TiN muhilayer film was better than that of TiN film. Conclusion Increased interface was beneficial for decreasing residual stress and enhancing corrosion resistance of muhilayer films.