CVD法制备纳/微结构ZnO反应过程中的流场模拟

Simulation of the Flow Field of the Reaction Process of Nano/Micron ZnO Preparation by CFD

利用FLUENT软件模拟了CVD法制备ZnO时双管管式炉内流场的分布。研究了在无化学反应发生时,重力对Zn蒸汽分布的影响,以及在有化学反应发生时,保持进气总量不变的情况下,O_2含量对ZnO质量分布和反应速率分布的影响。模拟结果表明:重力有利于Zn蒸汽由内管向外管的扩散及Zn蒸汽与O_2的充分接触;当有化学反应时,保持进气总量不变,最大反应速率及对应的ZnO质量分数随着O_2含量减小而增大;反应生成的ZnO主要均匀分布在管式炉外管的下游区域。

The author of this paper has simulated the flow field in the dual-tube furnace in the preparation of ZnO by CVD with the software of FLUENT,and studied the influence of gravity on the distribution of Zn vapor in the absence of chemical reaction and the influence of the different proportions of O2 on the distribution of ZnO mass and the distribution of reaction rates in the case of chemical reaction with the unchanged total intake of air.The simulation results show that gravity is conducive to the diffusion of Zn vapor from inside the tubes and to outside the tubes and the contact between Zn vapor and O2,that when there is a chemical reaction with the total intake of air unchanged,the maximum reaction rate and the corresponding mass fraction of ZnO decreases with the increase of O2,and that ZnO is uniformly distributed in the downstream region of the outer tubes of the furnace tube.