行星式双面研磨轨迹均匀性研究

Research on Uniformity of Trajectory in Planetary Double-Side Lapping Process

蓝宝石(α-Al_2O_3)是一种机光电性能优良的功能晶体材料,在半导体和光电子等行业得到了广泛的应用。行星式双面研磨是蓝宝石基片平面加工的重要手段,加工过程中磨粒轨迹的均匀性对工件的加工精度和表面质量有着重要的影响。通过运动学分析建立了双面研磨磨粒轨迹方程和速度方程,提出一种基于Matlab离散统计的磨粒轨迹均匀性定量评价方法,并求取设定参数下双面研磨轨迹分布均匀性的方差值。

Sapphire is a kind of functional crystal material with excellent properties and widely used in the semiconductor and optoelectronic industry. Planetary double-side lapping is one of the most important methods in processing sapphire, the machi-ning precision and surface quality of work pieces are affected by the uniformity of abrasive trajectory significantly. In this pa-per, trajectory and velocity equations of abrasive are set up through the kinematical analysis of double-side lapping, and then a quantitative evaluation method of trajectory uniformity based on the Matlab discrete statistics is presented. With this method, variance value of abrasive's trajectory uniformity under given parameters is calculated and offers reference for the optimization of double-side lapping parameters.