基于石墨烯复合薄膜的平面微电感

Planar Micro-Inductance Based on the Graphene Composite Film

石墨烯由于其独特的组成结构,具有极其优异的电学性能,基于石墨烯薄膜的电子器件越来越受到研究者的关注。通过将石墨烯与微型导电线圈结合,探究石墨烯对线圈微电感性能的影响。滴涂石墨烯并通过三组对比实验确定石墨烯薄膜的干燥方式(-5℃冷干干燥、室温真空干燥和室温自然干燥)。结果显示,室温真空干燥形成的石墨烯薄膜更为连续均匀、薄膜厚度小且电阻率更低。进一步实验得到,45℃为室温真空干燥方式的较佳干燥温度。采用微电子机械系统(MEMS)工艺制备三种不同材料的微型导电线圈(铜导线、石墨烯/铜复合导线、石墨烯导线)。对三种线圈的电学参数进行测试,发现石墨烯/铜复合导电线圈的电感性能有较大提高。

The graphene has extremely excellent electrical properties because of its unique composite structure.Electronic devices based on graphene films are taken more and more attention by researchers.The effect of the graphene on the micro-inductance of the coil was explored by combining the graphene with the micro-conducting coil.The graphene solution was dropletly coated and three sets of experiments were designed to determine a better drying method of graphene films(cold drying at-5 ℃,vacuum drying at room temperature and natural drying at room temperature).The results show that the graphene film of vacuum drying at room temperature is more continuous and uniform,and has thinner thickness and lower resistance.Further experiment shows that 45 ℃is the preferred drying temperature of vacuum drying at room temperature.By the micro-electromechanical system(MEMS)technology,three kinds of micro-conducting coils with different materials were fabricated(copper wire,graphene/copper composite wire and graphene wire).The electrical parameters of the three coils were tested.The results show that the inductance performance of the graphene/copper composite conductive coil is improved.