一种用于湿度监测的LC无线无源传感器的制备与测试

Preparation and Measurement of a LC Wireless Passive Sensor for Humidity Monitoring

提出了一种采用丝网印刷和亚胺化工艺制备的LC无线无源技术的二硫化钼(MoS2)/聚酰亚胺(PI)湿度传感器。对比了不同超声时间下的二硫化钼/聚酰亚胺复合材料的湿度敏感性能,得出对湿度最灵敏的材料为超声4 h的二硫化钼/聚酰亚胺材料。测试结果表明,制备的器件在量程10%RH～95%RH内具有较好的频率响应,频率变化值为6.205 MHz;在高湿度范围内(60%RH～95%RH),传感器的灵敏度可达153.59 kHz/%RH。此外,该传感器的响应和恢复时间分别为7.2 s和10.4 s,迟滞性误差约为5%RH且具有较好的稳定性。该传感器可广泛应用于化学合成和矿井环境等领域的湿度监测。

A molybdenum disulfide(MoS2)/polyimide(PI)humidity sensor was proposed using LC wireless passive technology prepared by the screen printing and imidization process.By comparing the humidity sensitivity of the molybdenum disulfide/polyimide composites for different ultrasonic time,it is found that the most sensitive material for humidity is the molybdenum disulfide/polyimide material with ultrasonic time of 4 h.The test results show that the prepared device has a good frequency response in the range of 10%RH-95%RH and the frequency change value is 6.205 MHz.The sensitivity of the sensor is up to 153.59 kHz/%RH in the high humidity range(60%RH-95%RH).In addition,the response time and recovery time of the sensor are 7.2 s and 10.4 s,respectively,the hysteresis error is about 5%RH,and the sensor has a good stability.The sensor has broad application prospects in the fields of chemical synthesis,mine environment and so on for humidity monitoring.