基于MEMS的矩形微同轴技术研究现状

Study Status of the Rectangular Micro-Coaxial Technology Based on MEMS

矩形微同轴技术已成为射频微电子机械系统(RF MEMS)的一个重要发展方向。矩形微同轴的电性能相比于传统的传输结构(如微带、共面波导等)在毫米波宽带领域具有巨大优势。从结构、性能等方面对矩形微同轴进行了简要分析。回顾了矩形微同轴技术在其发展的不同阶段出现的体硅刻蚀技术、EFABTM和PolyStrataTM技术,并对矩形微同轴的结构、加工工艺及射频性能等方面进行了简要分析。介绍了矩形微同轴技术在不同RF MEMS中的应用,并对获得的特性进行了讨论。矩形微同轴技术应用于高度集成的RF MEMS是发展的必然趋势,必将对传统射频电路的设计、制备及系统集成产生巨大影响。

The rectangular micro-coaxial technology has become an important development direction of the radio frequency micro-electromechanical systems(RF MEMS),and the electrical perfor-mance of the rectangular micro-coaxial structure has great advantages over that of the traditional transmission structure,such as the microstrip and coplanar waveguide,for the millimeter wave broadband field.The rectangular micro-coaxial structure and its performance are simply analyzed,and different development stages of the rectangular micro-coaxial technology are reviewed,such as bulk silicon etching,EFABTMand PolyStrataTM,which are simply discussed from the aspects of the structure,fabrication process and RF performance.The applications of the rectangular micro-coaxial technology for various RF MEMS are introduced,and the obtained characteristics are discussed.The high-level integrated RF MEMS with the rectangular micro-coaxial technology is the inevitable development trend,which will deeply impact on the design,fabrication and system integration of traditional RF circuits.