基于微结构PDMS介质层的电容式柔性阵列压力传感器

Capacitive Flexible Array Pressure Sensor Based on the Microstructure PDMS Dielectric Layer

提出了一种微结构聚二甲基硅氧烷(PDMS)为介质层的柔性阵列压力传感器,采用微电子机械系统(MEMS)工艺实现了传感器电极的制备,采用三明治的结构实现了柔性阵列压力传感器的制备。利用压力机和LCR电桥对不同厚度的微结构PDMS作为介质层的传感器性能进行了测试。测试结果表明,采用微结构PDMS为介质层明显提高了传感器的灵敏度,当介质层厚度为0.5 mm时,0～5 kPa和5～20 kPa下传感器的灵敏度分别为0.18 kPa-1和0.02 kPa-1,同时传感器具有良好的重复性(>1 000次)、快速的响应时间(<200 ms)和低的检测极限(约为5.5 Pa)。该传感器能够准确、灵活地监测外部压力的变化和分布,适用于未来智能机器人中电子皮肤的应用。

The flexible array pressure sensor with the microstructure polydimethylsiloxane(PDMS)as the dielectric layer was proposed.The preparation of the sensor electrodes was realized by the micro-electromechanical system(MEMS)process,and the preparation of the flexible array pressure sensor was realized by using a sandwich structure.The performances of the sensors with different thicknesses of the microstructure PDMS dielectric layers were tested by the press machine and LCR bridge.The test results show that the sensitivity of the sensor is significantly improved by using the microstructure PDMS as the dielectric layer.When the thickness of the microstructure PDMS dielectric layer is 0.5 mm,the sensitivities are 0.18 kPa-1 and0.02 kPa-1 at 0-5 kPa and 5-20 kPa respectively,and the sensor has good repeatability(>1 000 times),fast response time(<200 ms)and low detection limit(about 5.5 Pa).The sensor can accurately and flexibly monitor the change and distribution of external pressure,and is suitable for the application of electronic skin in smart robots in the future.