摘要
本文报道用分光光度仪对GDa-Si:(Cl,H)薄膜的光学性质进行测量的结果,并采用较严格的两层膜透射公式进行处理.发现掺CI以后,材料的光学能隙(E_o)增大,热学稳定性增加,同Si-CI键有较强的键合能的结果一致.
The optical properties of GD a-Si:(Cl,H) films have been measured.The formulae for transmission and reflection eoefficients for two layer films with regard to the inter-ference effect are deduced and used to analyse the measured data.The results showthat with introduction of chlorine,the optical gap increases and the thermal stability isimproved.This can be attributed to the formation of rather strong Si-Cl bonds.
