多弧离子镀制备TiSiN涂层的结构及其摩擦学行为

Structure and Tribological Properties of TiSiN Coatings Prepared by Arc Ion Plating

为了研究Si含量对TiSiN涂层性能的影响,采用多弧离子镀技术在Ti6Al4V表面制备了不同Si含量(质量分数)的TiSiN涂层。利用扫描电子显微镜(SEM)、透射电子显微镜(TEM)、电子能谱仪(EDS)、X射线光电子能谱仪(XPS)纳米压痕仪、摩擦磨损试验机表征其表面形貌、成分,力学性能及摩擦学性能。结果表明:随着靶材中Si含量的增加,涂层硬度从35GPa增加到42GPa。在TiSiN涂层中Si元素主要以Si3N4非晶态存在,形成了非晶Si3N4包裹TiN纳米晶结构。当靶材中Si含量为8%时,涂层在海水中的磨损率约为2.1×10-6 mm3/(N·m),此时涂层的摩擦性能最好。

To study the effects of the Si content on the properties of TiSiN coatings. TiSiN coatings were prepared on Ti6A14V by arc ion plating. Surface morphology, microstructures, phase compositions and mechanical properties of the TiSiN coatings with different Si content were characterized by SEM, TEM, EDS, XPS, nanoindentation and tribometer. The results show that the increase of the Si content causes a more fine-grained densification microstructure. At the same time, the hardness increases from about 35 GPa to 42 GPa. The Si element in the TiSiN coatings exist as amorphous Si3 N4 and the TiN is wrapped by amorphous Sia N4 in the TiSiN coatings. When the Si content being 8%, the wear rate of the TiSiN coatings is 2.1×10^-6 mm3/（N·m）, exhibiting the best tribological properties.