旋涂法制备ICF分解实验用薄膜靶

Fabrication of Plane Film Target for ICF Resolved Experiments

采用旋涂工艺,以K9玻璃为衬底,制备低表面粗糙度的惯性约束聚变(ICF)分解实验用的聚苯乙烯(CH)和聚氯乙烯(PVC)平面薄膜靶,对它们的厚度、宽度和表面光洁度等靶参数进行测量.结果表明,CH和PVC平面薄膜靶的厚度分别为18μm和6μm,对应的宽度分别为200μm和300μm.CH和PVC平面薄膜靶都具有较好的表面光洁度,它们平均粗糙度Ra的最大值分别3.7 nm和4.5 nm,TIR表面最高点与最低点差值TIR的最大值分别58.4 nm和56.8 nm.

In order to meet the need of inertial confinement fusion（ ICF） resolved experiments,the plane polystyrene（ CH） and polyvinyl chloride（ PVC） film targets were fabricated by using K9 glass as substrate via spin-coating process. The thickness,width and surface smoothness of CH and PVC film targets were measured. The results indicate that their thickness are 18 μm and 6 μm while the width are 200 μm and 300 μm. The CH and PVC film targets possess good surface smoothness,the maximum of their Ra are 3. 7 nm 和4. 5 nm,the maximum of their TIR are 58. 4 nm and 56. 8 nm.