基于音圈电机驱动的新型柔顺光学振动台设计分析

Design and analysis of novel micro-optical vibration testbed based on voice coil motor drive

提出一种基于音圈电机驱动和柔性铰链支撑的新型柔顺光学振动台的机械结构,该高性能微位移光学振动台用以完成对微传感器和部件的角位移和角速度特性测试,在MEMS陀螺和角加速度计等惯性元件的性能测试场合有广泛的应用前景。描述了基于音圈电机驱动和精密柔顺铰链支撑优化设计的光学振动台的设计过程,该光学振动台使用精密电涡流位移传感器进行角位置的测量反馈。通过对柔性支撑的理论分析和实验验证,建立了柔性铰链的动力学模型,分析了铰链的阻尼和固有频率特性;推导了光学振动台控制系统的数学模型并进行实验模型辨识;针对该模型在较低频率处存在结构谐振的特点,进行了光学振动台高带宽控制器设计,获得了较好的控制效果。

The mechanical construction of the novel micro- optical vibration testbed（MOVT） based on voice coil motor drive and flexure hinge support are presented. The high performance MOVT can complete the angular displacement and velocity testing for the micro-sensor and its parts,and has wide application prospect in the performance tests of inertial elements,such as MEMS-gyro and angular accelerometer. The design procedure of the optical vibration testbed based on voice coil motor drive and precision flexure hinge support is introduced,in which the precise eddy current displacement sensor is adopted to measure and feed back the angular position. The dynamical model of the flexure hinge was established by theoretical analysis and experimental verification of the flexure support,and the damping and inherent frequency characteristics of the hinge were analyzed.The mathematic model of the MOVT control system is deduced,and the identification of experimental model is conducted. For the model has the resonance performance in low frequency condition,the high bandwidth controller of the MOVT was designed.The good control effect was obtained.