摘要
根据在线湿法刻蚀设备的工艺要求及特点,介绍了控制系统的构成,CANopen网络控制方式,以及同步传送、自动补配液、自动清洗等功能,从而保证批量在线生产的工艺效果。
According to the technical requirements and characteristics of the online wet etching equipment, this paper introduces the control system. This system based on CANopen network includes synchronous conveying, automatic supply, automatic cleanout and so on. The process of mass production is ensured.
出处
《电子工业专用设备》
2015年第8期33-36,共4页
Equipment for Electronic Products Manufacturing
