摘要
高分辨率TFT曝光技术随着第三代显示技术--AMOLED显示技术和高PPI显示技术的发展,已经成为平板显示的最关键技术之一,实现高分辨曝光的TFT曝光机也是ARRAY段最核心设备。介绍了可用于G2.5代TFT玻璃基板制造的高分辨率扫描投影曝光机SSB225/10,并以实际测试数据及制造成功的AMOLED显示器件表明该设备能够很好地满足LTPS-TFT工艺要求。
With development of the third generation display technology--AMOLED and high PP1 display technology, it is apparently one of the key technology for high resolution TFT exposure process. And TFT lithography tool, which can implement high resolution exposure, is the kernel equipment in ARRAY phase. This paper introduces a creative type of projective scanner--- SSB225/10 for G2.5 TFT plate high resolution exposure process. Furthermore testing data and AMOLED display panel show the scanner can meet well with requirement of LTPS-TFT process.
出处
《电子工业专用设备》
2015年第11期1-7,共7页
Equipment for Electronic Products Manufacturing
