Electrical and Structural Properties of Radio Frequency （RF） Sputtered ZnO Thin Film at Low Substrate Temperature
Electrical and Structural Properties of Radio Frequency （RF） Sputtered ZnO Thin Film at Low Substrate Temperature
关键词
电气控制
控制理论
电气测量
集中参数
ZnO, electrical resistance, RF-magnetron sputtering, XRD
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