基于叉丝阵列的准分子激光MOPA系统多路光束自动准直

Automatic alignment of multiplexed beams of excimer laser MOPA system based on crosshair array

为了实现激光在放大器多程放大及靶面高指向精度,介绍了高效准分子激光系统多路光束自动准直技术的研究工作。提出利用双叉丝阵列像传递光路,分别在输入光路和输出光路上设置叉丝阵列作为近远场基准,解决了光路中无天然准直基准及多路并行准直等问题。搭建了预放大器II的三路双程激光自动准直系统,验证了该方法的可行性,并利用成像系统和反馈控制结构实现了自动准直系统的联调实验。

In order to achieve precise multi-passes amplification on amplifiers and hi^ih pointing accuracy on target of laser beams, study on multiplexed beams automatic alignment of high efficiency excimer laser was described. Image-relaying structure with two cross-hairs, served as the near-field and the far- field references on the input beam and output beam, was proposed. In this way, the problems of nonexistence of nature alignment reference and parallel automatic alignment of multiplexed beams were solved accordingly. In the end, laser automatic alignment system of the three beams with double paths in pre-amplifier II was set up, which validated the feasibility of this method. Meanwhle, joint experiment of automatic alignment system including imaging system and feedback control structure was accomplished.