基于自导向位移放大过程的机械式柔性纳米精度移动平台运动机制研究

Investigate on The Mechanism of Mechanical and Flexible Positioning Stage with Nanoresolution Based on Self-oriented Motion Amplification

提出了一种纳米精度级的单轴柔性移动平台装置。该装置采用自导向位移放大机理,在紧凑结构尺寸实现了高达厘米量级的行程范围。其中,有倾角的双模块平行四边形结构在充当移动导向模块的同时也实现了位移放大效果,从而避免了串行连接。该装置的结构对称性能够减小连带误差和热变形,从而提高定位精度。通过设计优化框架对装置的结构参数进行优化,从而在保证预设行程范围、应力和结构尺寸的情况下得到最大的共振频率。并且通过对该装置的有效性进行了实验验证,结果显示,与其他相似尺寸平台相比该装置有更高的容积率。

In this study, a single-axis flexible mechanism with nanoresolution is proposed. A self-oriented displacement amplification mechanism is adopted which can not only enable the range of motion to up to millimeter, but also can realize the result of displacement amplification. Also, the parallelogram of skewed double-compound structure plays the role of mo-tion orientation and displacement amplification, resulting in the elimination of serial connection. On the other hand, be-cause of the structural symmetry, the positioning accuracy is also improved due to the structural symmetry as a result of the reducing of thermal deformation and error of parasitic motion. According to the designing optimization framework, the de-sign parameters are optimized to get a high first resonance frequency and meantime guarantee the predetermined travel range, stress and size. In the addition, through the experimental analysis of the efficiency, it demonstrates that the proposed mechanism owns higher volume efficiency compared with other apparatuses of similar size.