摘要
基于压电本构方程,建立了压电弹性复合驱动膜的机电耦合模型,利用ANSYS软件对压电复合膜进行了静态及一阶模态分析,对比分析了空心与实心PZT复合膜片的驱动能力,分别讨论了复合膜厚度、压电膜与弹性膜直径比等结构参数对膜片振动挠度的影响,获得了压电层与弹性层最佳粘贴比.
Based on the piezoelectric constitutive equation, the finite element model of coupled- field of PZT-Si3N4 film is established. Static analysis and first order modal simulation on the PZT- Si3N4 film are accomplished by using ANSYS software. The actuation capability of ring film is compared with that of circular film. The influences of structural parameters of actuation film such as thickness and diametrical ratio on actuatting deflection are analyzed separatedly. The optimum bonding ratio of PZT/Si3N4 is obtained.
出处
《上海电力学院学报》
CAS
2015年第6期565-567,580,共4页
Journal of Shanghai University of Electric Power
关键词
微机电系统
压电驱动
弯曲振动
机电耦合
Micro-Electro-Mednanical System （ MEMS ）
piezoelectric actuation
bending vibration
electromechanical coupling
