摘要
低温共烧陶瓷(Low Temperature Co-fire Ceramic——LTCC)技术,具有可集成无源电阻的独特优势。LTCC基板集成电阻主要有两种方式,表层电阻和内埋电阻。主要讨论了LTCC基板内埋电阻的制备工艺。针对不同的电阻材料,设计了不同工艺。最终为不同电阻的制备提出了一种优化的工艺,使得LTCC内埋电阻的精度控制范围可达到±17%。
Low Temperature Co-fire Ceramic（LTCC） technology offers a unique advantage in passive components. The integral resistors in LTCC include surface resistors and embedded resistors. In this study the processing of embedded resistors in LTCC substrates have been discussed. The experimental work has been made with different types of resistor material. By optimizing the processing, the embedded resistance tolerances smaller than ±17% were achieved.
出处
《电子与封装》
2015年第12期30-33,37,共5页
Electronics & Packaging
关键词
LTCC
内埋电阻
印刷工艺
精度
LTCC
embedded resistors
the print processing
resistance tolerances
