可控阴极弧制备的梯度及调制多层CrN/Cr薄膜的组织结构和力学性能研究

Synthesis of Gradient and Multilayered CrN/Cr Coatings by Controlled Arc Ion Plating and Their Mechanical Properties

采用可控阴极弧的沉积方法在GCr15基体上制备了梯度和调制多层结构的氮化铬/铬(CrN/Cr)薄膜,对不同的CrN/Cr薄膜的组织结构、力学性能和耐磨性能进行了研究。通过扫描电镜、能量散射谱、X射线衍射、纳米压痕、划痕试验、微摩擦磨损测试仪及形貌测试仪对薄膜的组织结构、成份、力学性能、结合强度及耐磨性能进行了分析。结果表明:制备的薄膜厚度约5.5μm,梯度结构及调制多层CrN/Cr薄膜呈现明显的立方CrN(111)(200)取向,薄膜力学性能(包括硬度,模量,结合强度等)及耐磨性能均与不同的结构及调制周期相关。梯度结构的CrN/Cr薄膜硬度达到25 GPa,结合强度55 N,磨损率为32.754×10-6mm3/N·m,力学及耐磨性能明显优于其它多层结构,说明梯度结构可有效地改善CrN/Cr薄膜的性能。

The gradient and CrN / Cr multilayered coatings were synthesized by controlled arc ion plating on substrate of bearing steel. The impact of the gradient structure and modulation period on the microstructures and mechanical properties was investigated with X-ray diffraction scanning electron microscopy,energy dispersive spectroscopy and conventional mechanical tools. The preliminary results show that depending on the gradient structures and number of modulation period,the gradient and CrN / Cr multilayered coatings significantly affect the mechanical properties of the substrate. To be specific,the（ 111） and（ 200） preferentially oriented cubic CrN / Cr gradient coatings,5. 5 μm in thickness,outperform the multilayered CrN / Cr coatings because of its improved mechanical properties,including a hardness of 25 GPa,an interfacial adhesion of 55 N and a wear-rateof 32. 754 × 10^- 6mm^3/ N·m