摘要
将为HT 7U装置第一壁研制的一种新型掺杂石墨及其SiC厚膜梯度涂层材料放在自行设计的一种真空性能评价装置的样品室 ,通过程序升温和控温 ,出气率实验分别在室温、30 0℃和 35 0℃ 3种温度下进行。通过真空计和四极质谱仪分别对样品室和主真空室的全压、分压和出气成分进行监测 ,在获得被测试材料的出气率和出气成分等真空性能参数后 ,认为该种新材料的真空性能适于今后HT 7U装置的使用要求 。
A newly developed mixed carbon materials and its thick gradient SiC coatings developed for HT 7U device were put into the sample chamber of an apparatus designed by us for evaluation its vacuum performance, with the temperature of sample vessel raised and controlled, the experiments were conducted in room temperature, 300 ℃ and 350 ℃ respectively. The pressure and outgassing composition of the vacuum chamber were detected by vacuum gauge and quadruploe mass spectrometer, after evaluation experiment the conclusion can be drawn that the vacuum performance of the new type materials is suitable for using in HT 7U device, and the experimental results also provide the base for the wall conditioning of this kind materials in fusion device.
出处
《真空电子技术》
2002年第1期8-12,共5页
Vacuum Electronics
基金
国家自然科学基金重点资助项目 (项目编号 19885 0 0 4)