真空微电子三极管静电场电容的计算机数值模拟

Simulation of Electrostatic Field Capacitance for Vacuum Micro-triode

以静电学基本原理、场致发射原理为基础 ,用有限元法在求得圆锥形、楔形阴极真空微电子三极管内静电场各点场强的前提下 ,考虑以往计算中忽略的各电极之间、栅极厚度对器件电容的影响进行极间电容的计算。通过计算多导体系统电荷密度较为精确地求得了圆锥形、楔形阴极真空微电子三极管的极间电容 ,讨论了器件各几何参数与电容的关系 ,对器件的优化设计与高频应用具有指导作用。

The electrostatic field capacitance between the electrodes of a vacuum micro triode system is simulated by finite element method on the basis of electrostatic and the field emission theory of vacuum microelectronics. The grid cathode capacitance of wedge cathode and cone cathode vacuum micro triodes is calculated from the distribution of charge density in the system including the influence of other electrodes and the thickness of grid which had always been neglected in previous calculations. The relation between the capacitance and the geometrical parameter is discussed in order to find better devices geometry for high frequency application. The simulated results are in agreement with the experiment results reported.