摘要
分析了升高模式扫描电容显微镜 (LM SCM)的工作原理 ,得出了像的对比度正比于样品表面电容梯度分布 ,且在一定针尖 样品模型下 ,也可得到样品表面的电容分布。利用LM SCM研究了金电极的表面电容梯度分布 ,其横向分辨率优于 5 0nm 。
We report the principles of scanning capacitance microscope (SCM) operating at lift mode (LM).The image contrast is proportional to the capacitance gradient distribution of the sample surface,and the surface capacitance distribution can be calculated at a certain tip sample model.A gold electrode sample was studied with this LF SCM,the lateral resolution was above 50 nm indicating its great potential application in nanoelectronics.
出处
《真空电子技术》
2002年第1期23-25,共3页
Vacuum Electronics
