气流式倾角传感器不同敏感丝布局分析

Analysis of different sensor wire distributions in gas pendulum tilt sensor

基于气流式倾角传感器的敏感机理,对密闭腔体的不同敏感丝布局进行了分析。应用ANSYS软件,对气流式倾角传感器腔体的对流场进行仿真,解释了倾角传感器的敏感机理。根据气流式倾角传感器的敏感机理,提出3种不同敏感丝布局,定性分析了3种布局的敏感机理,测定了不同布局下的输出信号随倾角的变化关系。实验表明,敏感丝的3种不同空间布局都能输出随倾角成比例的输出信号,热源—单敏感丝布局的稳定性较好,双敏感丝布局的零位漂移较小,单敏感丝布局的工艺简单,并且成本低更有利于小型化。

Based on sensing mechanism of gas pendulum tilt sensor, different sensor wire distributions in hermetic chamber were analyzed. Using ANSYS software,flow field of gas pendulum tilt sensor was simulated while the mechanism of gas pendulum sensor was explained with the results of simulation. According to the mechanism,three different sensor wire distributions were introduced,the mechanism of the outputs were deduced and analyzed qualitatively,and the relations of output signal with obliquity were measured. Results show that all the output signals change proportionately with tilt angle;the output of source-single wire distribution is better in stability, and the output of double wire distribution has small drift of bias,while the single wire distribution is simple in craftwork,low in cost and easy for miniaturization.