碳化硅基MOEMS压力传感器建模与仿真研究

Modeling and Simulation of SiC-based MOEMS Pressure Sensor

针对航空航天领域对高温极端条件下压力测量的高性能要求,提出一种基于碳化硅(Si C)弹性敏感膜片曲率变形来实现反射式光纤传感测量压力的方法。基于弹性力学理论和网格模拟方法探讨了敏感元件Si C圆平膜片的应力和形变分布,推导出光纤反射式微机电系统Si C压力传感器的数学模型,并对Si C压力传感器敏感元件的最大量程、灵敏度、输入-输出特性等进行了一系列的优化分析和计算机模拟。仿真结果表明了Si C敏感膜片的光测力灵敏度最优设计方法,在大量程范围内具有优越的线性工作特性,为研发大量程碳化硅基微光机电系统(MOEMS)压力传感器提供了有力的理论依据。

Under the extreme high-temperature in the field of aeronautics and astronautics,a reflective optical-fiber sensing method based on the curvature deformation of silicon carbide circular diaphragm was presented for high-performance pressure measurement. The stress and deformation distribution of the Si C circular diaphragm as sensitive element was discussed by elastic mechanics theory and grid simulation. The mathematics model of Si C pressure sensor in the reflective optical-fiber MEMS system was deduced. And a series of optimization analyses and computer simulations about maximum measuring-scale,sensitivity,input-output characteristics for the Si C circular diaphragm were achieved. The simulation results show the optimal design scheme for obtaining highest sensitivity in optical-force measurement of Si C diaphragm,and the favorable linear operation characteristic appears at the large measuring-scale,thus providing the theoretical foundation for designing of Si C-based MOEMS pressure sensors.