不同热处理对超精密加工镜面铝表面质量的影响

Effects of different heat treatment on ultra-precision machining mirror aluminum surface quality

采用扫描电镜,金相显微镜,白光共聚干涉显微镜对不同热处理下镜面铝的表面形貌及表面粗糙度进行分析。结果表明,当不加压只加热时,随着温度的升高和保温时间的延长,镜面铝表面形貌均变化不大,表面粗糙度变化也不大,变化量小于10 nm;当压强为3 MPa时,随着温度的升高,表面形貌变得粗糙,表面粗糙度也逐渐增加,特别是当温度为500℃时变化最大,表面粗糙度增加了136.12 nm,压力使铝的表面氧化膜破碎,随着温度的升高表面形貌及表面粗糙度也随之变化。

Surface morphology and roughness of aluminum mirror were analyzed by scanning electron microscopy,optical microscopy,white light confocal interference microscope under different heat treatment.The results show that,when not pressurized only heated,with temperature and holding time increasing,the surface morphology has a little change and the surface roughness will not change much with less than 10 nm variation.When the pressure is 3 MPa,as the temperature increasing,the surface morphology becomes more rough and the surface roughness also increases,especially when the temperature is 500 ℃,the maximum change in the surface roughness increased by136.12 nm,due to the surface oxide film of aluminum broken under pressure,with the temperature rising,the surface morphology and roughness also will be changed.