摘要
针对加热测温一体化集成微热板阵列气体传感器的需要,以微热板加热性能测试参数为依据,提出了一种基于微热板气体传感器阵列的单片集成方案。该方案包括由四个微热板构成的传感器阵列,加热驱动单元和信号采集单元。采用Hspice软件对加热驱动电路和信号采集电路进行设计,并进行了芯片电路系统的仿真。仿真结果表明实现了微热板的独立控温和信号的采集,验证了该方案的可行性和正确性。
Aiming at the application requirements of the integrated MHP（Micro-hotplate） gas sensor array,a mono-lithic integrated scheme was proposed based on the test parameters of the Micro-hotplate＇s heating performance.Thescheme consisted of four MHP gas sensor array,heating driver block and signal acquisition block. The chip circuitwas designed by using Hspice and simulation analysis was accomplished.The simulation results showed that the pro-posed chip circuit met the design requirement. The independent temperature control of MHP and the signal acquisi-tion were realized.The feasibility and correctness of the scheme was verified.
出处
《传感技术学报》
CAS
CSCD
北大核心
2015年第11期1620-1624,共5页
Chinese Journal of Sensors and Actuators
基金
院级青年科学基金项目(2015LQ02)
关键词
集成气体传感器阵列
单片集成
微热板
HSPICE
仿真分析
integrated gas sensor array
monolithic integration
MHP（micro-hotplate）
hspice
simulation analysis
