微细加工表面的三维微观形貌比较分析

A comparative analysis of 3D micro-topography of micromachining surface

分析三种微细加工表面微观结构、表面凸峰的高斯曲率以及表面谱距特征的结果表明,微细电火花线切割加工表面由随机分布的半球状或半椭球状的凸峰和凹坑组成,没有明显的纹理方向,表面高度、斜度均一性及等方性较好,呈典型的各向同性特征.精密磨削加工表面由较为规则的棱和沟组成,有明显的加工纹理方向,表面斜率均一性和等方性较差,呈典型的各向异性特征.激光微细加工表面由单峰和多峰相连组成,表面纹理方向性不明显,表面等方性很好,但高度和斜率均一性较差,虽然属于各向同性表面,但具有特殊性,在表面评价时应选取适当评价参数.

Microstructure,Gaussian curvature of surface peaks,and surface spectrum moment characteristics of machining surfaces were inverthgated in this paper. The results show that MWEDM is composed of random distributional peaks and pits of hemisphere and semiellipsoid. MWEDM has no obvious texture direction. Homogeneity and isotropy of height and slope of MWEDM surface are good. MWEDM surface has typical isotropy characteristic. Precision grinding surface is composed of regular prism and groove and has obvious machining texture direction.Homogeneity of slope and isotropy are poor and precision grinding surface has typical anisotropy characteristic. Surface structure of laser assisted microprocessing is conjointly composed of single peak which has one of hyperboloid of two sheets and multipeak which has saddle shape. The surface of laser assisted microprocessing has no obvious texture direction. Although the surface isotropy is better,homogeneity of height and slope is worse.Although the surface is more close to isotropy,surface homogeneity is worse. Against its particularity,proper evaluation parameters should be chosen when evaluating it.