摘要
移相误差是影响移相干涉术测量精度的主要来源,针对移相器的线性移相误差,文中提出一种新型的移相干涉术算法-N步移相算法。该算法通过最小二乘法估计出移相器做等步移相时的实际移相相位,利用上述估计值代入相位计算公式获得被测物体的相位分布。同时对该算法进行仿真研究,其结果表明,算法能准确地估计移相相位,获得被测物体的精确相位分布,并可实现λ/100的高精度测量,且在测量精度上明显优于其他算法。
Phase-shift error is always the main source of the measurement precision in phase-shifting interferometry. In this paper, a new phase-shifting interferometry algorithm named N-sample phase-shifting algorithm is proposed, which can greatly reduce the phase reset error caused by linear phase shifting deviation. Firstly, step phase shifts of phase shifter are estimated. Secondly, the phase distribution of a fringe pattern is calculated by using the obtained phase shifts. Computer simulation shows the proposed algorithm accurately estimates the phase shift and obtains the phase distribution with an accuracy of A/100, much better than those of existing algorithms.
出处
《电子科技》
2016年第2期30-33,共4页
Electronic Science and Technology
关键词
线性移相误差
移相干涉术
移相器
相位分布
linear phase-shift error
phase-shifting interferometry
phase shifter
phase distribution
