基于八悬臂梁-中心质量块结构MEMS压电振动能量采集器

MEMS Piezoelectric Vibration Energy Harvester Based on Eight Cantilever Beams-Center Mass Block

高能量密度输出、低频范围响应、环境适应性强的自供电振动能量采集器已成为微能源技术领域的一个重要发展方向。提出一种d31型工作模式下MEMS压电式振动能量采集器,设计八悬臂梁-中心质量块结构代替传统的单悬臂梁结构,利用溶胶-凝胶(Sol-Gel)技术在每个悬臂梁上异质集成制备锆钛酸铅(Pb(Zr_(0.53)Ti_(0.47)O_3,PZT)压电功能厚膜层,通过MEMS工艺和引线键合技术完成器件础结构制造。输出性能测试结果表明,器件一阶谐振频率为41 Hz,3 gn加速度激励下输出电压峰峰值为264.00 m V;在器件两端加载3.00 MΩ负载时输出功率最大,为0.72 n W。

The self-powered vibration energy harvester,which has high output energy density,low frequency rangeresponse and strong environment adaptation,has been an important developing direction of micro-energy technolo-gy. MEMS vibration energy harvester based on piezoelectric effect in d31 mode is presented,of which the foundationstructure of eight cantilever beams-center mass block is designed to replace the traditional single-cantilever struc-ture. The heterogeneous integration manufacturing of the PZT piezoelectric layer is achieved on each cantilever bySol-Gel method. And the device is fabricated by using the MEMS micromachining process and wire bonding technol-ogy. The output performance results show that the device produced 264.00 m V and 0.72 n W with an optimized resis-tance load of 3.00 MΩ from 3 gnacceleration at the first-order resonant frequency of 41 Hz.