摘要
采用阴极弧蒸发涂层工艺在硬质合金基体上沉积了TiN/AlTiN纳米多层涂层。利用光学显微镜、SEM、XRD、显微硬度计和划痕测试仪、纳米压痕仪,分析了涂层的组织形貌、纳米调制周期、化学成分、物相组成、结合强度和硬度,并对涂层硬质合金刀片进行了铣削合金钢的切削性能测试。研究结果表明:TiN/AlTiN纳米多层涂层具有致密的柱状晶结构,保留了AlTiN单层涂层的(200)择优取向。大尺寸熔滴Ti含量高、小尺寸熔滴Al含量高,涂层中Al含量低于靶材。调制周期为18.4 nm的TiN/AlTiN纳米多层涂层具有良好的结合强度(>100 N)和高的硬度(28.2 GPa)。相同涂层厚度的情况下,TiN/AlTiN纳米多层涂层具有比同类单层涂层更高的耐磨性,表现出更好的切削性能。
TiN/AlTiN nano-multilayer coating was deposited on cemented carbide substrate by cathodic arc-evaporation. The microstructure, morphology, nano-modulation period, chemical composition, coating phase structure, bonding strength and hardness were investigated by using optical microscope（OM）, scanning electron microscopy（SEM）, X-ray diffraction, micro-hardness tester, scratch tester and nano-indentation tester. Alloyed steel milling tests were performed on cemented carbide coated inserts. The results showed that TiN/AlTiN nano-multilayer coating has dense columnar structure and keeps（200） as the preferred orientation which is the same as AlTiN single layer coating. Big droplets are rich in Ti while small droplets are rich in Al. Al content in the coating is lower than in the target. The TiN/AlTiN nano-multilayer coating with modulation period 18.4 nm obtains good bonding strength（〉100 N） and high hardness（28.2 GPa）. For coating with the same thickness, TiN/AlTiN nanomultilayer coating is more wear resistant than similar single layer coating which leads to better cutting performance.
出处
《中国钨业》
CAS
北大核心
2015年第6期49-53,共5页
China Tungsten Industry
基金
2015年工业转型升级强基工程高端装备用高性能硬质合金刀具涂层技术重点项目(TC150B5C0/31)
