5Wen Fung Jacky, Chung Po Sheun. The use of Circular Dam- mann Grating (CDG) in angle measurement[C]. Conference on Lasers and Electro-Optics (CLEO) , JWA,2008.
6Jabconaki R. Angle interference measurement[C]. Processing of the International Synposiumon Metrology for Quality Control in Production, Tokyo. 1984: 184-189.
7Shi P, Stijns E. Improving the linearity of the Michelson inter- ferometric angular measurement by a parameter compensation method[J]. Applied Optics, 1993, 32(1): 44-51.
8Meyer G, Amer N M. Novel optical approach to atomic forcemicroscopy[J]. Appl. Phys. Lett., 1988, 53(12): 1045- 1047.
9Ando T. High-speed atomic force microscopy coming of age [J]. Nanotechnology, 2012, 23(6): 062001.
10Putman C A J, de Grooth B G. A theoretical comparison be- Lween interferometric and optical beam deflection technique for :he measurement of cantilever displacement in AFM[J]. Ultra- nicroscopy, 1992, 42-44: 1509-1513.
