MPCVD谐振腔内电磁场分布的数值模拟

Numerical Simulation of Electromagnetic Fields of MPCVD Resonance Cavity

采用时域有限差分算法对MPCVD装置谐振腔中电磁波的分布进行了数值计算;推导出麦克斯韦方程在谐振腔内电磁场分布的数学模型;采用Ansoft软件对腔体中的电磁分布进行了模拟。根据模拟的电场形状以及其它相关的数据来判断此时反应器的形状和性能。数值模拟结果表明,空腔有3个大小相近的电场均匀区域,谐振腔的固有品质因素相对较高。计算模拟结果与实验结果较吻合,验证了计算和模拟的正确性,为设计利用MPCVD技术沉积金刚石薄膜的谐振腔提供了参考依据。

Based on the finite difference time domain method (FDTD), the distribution of the electromagnetic field for a given resonance cavity is numerically calculated. A mathematical model, which is based on the Maxwell Equation, is deduced to describe the electromagnetic field distribution of the cavity. The electromagnetic field distribution in the microwave resonance cavity is analyzed with Ansoft software. The properties of the cavity are judged according to the distribution of the electromagnetic field. The simulation results show that there are three even electric field regions, with the same size, in the empty cylinder microwave resonance, and that the cavity has a high quality. The numerical simulation results are in accordance with the experimental results.