微波CVD金刚石薄膜用作LED散热片的制备

Microwave CVD Thin Diamond Film for LED Heat Dissipation

由于金刚石具有室温下最高的热导率,因此用化学气相沉积(CVD)制备的金刚石膜是大功率发光二极管理想的散热材料。利用微波等离子体CVD研究了不同沉积工艺下金刚石薄膜的生长。用扫描电子显微镜(SEM)和拉曼光谱对得到的金刚石薄膜进行了表征,并将金刚石薄膜用作LED散热片的散热效果进行了检测。结果表明:CVD金刚石薄膜可以有效降低LED的工作温度;在相同的制备成本下,提高薄膜的厚度比提高薄膜的纯度更有利于提高LED的散热效果。

Having the highest thermal conductivity at room temperature, chemical vapor deposition (CVD)processed diamond film is an ideal heat dissipation material for high power light emitting diodes (LEDs). In this paper, microwave plasma enhanced CVD diamond films are deposited and, then, characterized using SEM and Raman spectroscopy. The heat-dissipation properties of the films are tested on LEDs. The results show that these thin diamond film can decrease the working temperature of LEDs, and, at the same cost, Mw CVD diamond films are thicker, lending to better heat dissipation than expensive film of higher quality.